A-52 SILICON WAFER PLATING LABORATORY EQUIPMENT SET

TRIAL AND SMALL-LOT PRODUCTION KIT, WAFER PLATING

Plating set for 2～12 inch silicon wafers. By using dedicated jigs, precision plating of semiconductors, MEMS and micromachines is possible. The set is designed with overflow-mechanism, which generates a gentle convection from the base of the tank, while conducting constant filtration. Paddle agitators are used for actual agitation. The set can also be used as production facility.

Not only silicone wafer, but also substrates made of SiC, Glass, GaAs, InP, and others are available.

(Several patents acquired and pending in Japan and abroad.)

Applicable standard size is 2～12inch, but we can accommodate your request to manufacture sets that meet various needs.
(Various types are such as fully sealed/non-sealed-type jigs, horizontal-type are available.)

*Please contact us for detail by e-mail.

Set Example

A-52-ST4AWJ-YPPA 4-inch Silicon Wafer Plating Laboratory Set Type WJ (for YPP Power Supply)

Product No.	Product Name	Quantity
A-52-ST4-P01A	4-inch Silicon Wafer Tank (acrylic double-bottom type)	1
A-52-ST4-P02A	4-inch Silicon Wafer Cathode Cartridge	1
A-52-ST4-P09A	4-inch Silicon Wafer Anode holder (w/Anode Bag made from raised fabric)	1
A-52-ST4-P04D	4-inch use Paddle Agitator	1
B-90-A20-APFA05	Mini-Mini Filter Model-20APFA (0.5μm Cartridge)	1
A-63-M202	Air Pump M202 (AC100V)	1
A-52-P18	Air Filter	1
B-85WJ	300W PFA Heater (AC100V)	1
A-52-ST4W-P01	4inch Clasp W (for 300W Heater, Liquid-Level Sensor, Thermostat Sensor)	1

*Power Supply, Thermostat and Anode are not included.
*PC is sold separately.

TRIAL AND SMALL-LOT PRODUCTION KIT, WAFER PLATING